EG2001-A.2001X III
Belt Track
  Indexer Assembly
  2010X (100Wafer Capacity)
  Control Module
  Noncontact Edge Sensor
  Wafer Id Reader
  Programable Chuck Pz5
  Thermal Chuck
  Test Head Manipuator
Disk Based System


2001xII 2001xIII
Programable Chuck Pz5

244636-002 PCB ASSY,MATL HDLG LGC-BELT DR
244639-002 PCB ASSY,PREALIGN DRVR-STD
114984-003 PCB ASSY, MTHBD LGC-BELT DRIVE
244606-005 MOTOR ASSY, OUT BELT P151
244606-006 MOTOR ASSY, IN BELT P135
247028-001 SENSOR ASSY,FLAT FIND-STD
247028-002 SENSOR ASSY, FLAT FIND - SPCL
247028-003 SENSOR ASSY,FLAT FIND-STD 3001
244223-002 MOTOR ASSY, THETA-BELT DRIVE
244238-002 MOTOR ASSY, SPINDLE
245484-001 PCB ASSY,XFER TRACK INTFC II
245554-001 MOTOR ASSY, XFR ARM-AIR TRACK
245554-002 MOTOR ASSY, XFR ARM-BELT DRIVE
247029-001 SNSR CA ASSY,FL FIND STD
247029-002 SNSR CA ASSY, FL FIND SPCL
247029-003 SNSR CA ASSY,FL FIND STD-3001X
247029-004 SNSR CA ASSY,FL FIND STD-4085
247030-001 SENSOR HOUSING, FLAT FIND-STD
247030-002 SENSOR HOUSING, FLAT FIND-SPCL
247030-003 SENSOR HOUSING, FLAT FIND
247031-001 SENSOR MOUNT, FLAT FIND - STD
247031-003 SENSOR MOUNT, FLAT FIND
245776-001 HSG, SENSOR-RTN TRK PAUSE STA
244373-011 CABLE ASSY, RTN TRK WFR SNSR
245779-001 SENSOR ASSY,RTN TRK PAUSE STA
245483-001 PCB FAB.XFER TRACK INTFC II
245484-001 PCB ASSY,XFER TRACK INTFC II
032987-011 MOTOR,STEP. 0.9DEG/9VDC/1SHAFT

Thermal Chuck

245439-001 PCB ASSY, LED DISPLAY
  025795 FINGER GUARD.PAPST'8000' FANS.

Test Head Manipuator

  247330-001 PLATE, PCB SUPPORT
  247393-001 SPACER, PCB SUPPORT PLATE
  247335-001 PCB ASSY, ADVANTEST 3710

Disk Based System

248981-001 PCB ASSY,SYSTEM MEMORY-PROM
248981-002 PCB ASSY,SYSTEM MEMORY-DISK
  248981-003 PCB ASSY,SYSTEM MEMORY RTM
248981-004 PCB ASSY, SYSTEM MEMORY RTM2
246551-001 PCB ASSY,FLOPPY DISK I/O BFR
245866-001 PCB ASSY,256K DYNAMIC RAM
246551-001 PCB ASSY,FLOPPY DISK I/O BFR