EG2001-A.2001X III
Belt Track
  Indexer Assembly
  2010X (100Wafer Capacity)
  Control Module
  Noncontact Edge Sensor
  Wafer Id Reader
  Programable Chuck Pz5
  Thermal Chuck
  Test Head Manipuator
Disk Based System


2001xII 2001xIII
Noncontact Edge Sensor

245023-001 PCB ASSY,THETA Z FUNCTION II
245023-002 PCB ASSY,THETA Z FCTN II-TI
244863-001 PCB ASSY,NON CONT EDGE SENSOR

Wafer Id Reader

246884-001 PCB ASSY, VIDECOM I/O ADPTR CD
246067-001 PCB ASSY,FOUR PORT SER I/O II

Programable Chuck Pz5

244736-001 PCB ASSY,THETA Z INKER DRIVERS
  114437-001 CABLE ASSY, STEPPER MOTOR MOD
  114437-003 CABLE ASSY STPR MOTOR,400 STEP
244984-001 GASKET,MOTOR-THERMAL TRANSFER
  032987-011 MOTOR,STEP. 0.9DEG/9VDC/1SHAFT
  244373-004 CABLE ASSY,THETA SENSOR PZ5
244373-012 CABLE ASSY,Z DOWN PZ 5
  032886 MOTOR STEP LD8EAM-2 E.AIR DEV
  244500-001 NUT PLMOTOR-Z DRIVE
245164-003 STPR MTR ENCDR ASSY,100STP 30T
245164-007 STPR MTR ENCDR ASSY 100STP 20T
  245164-008 STPR MTR ENCDR ASSY 100STP 40T
  245164-009 STPR MTR ENCDR ASSY 100STP 20T
245164-010 STPR MTR ENCDR ASSY 100STP 15T
244736-001 PCB ASSY,THETA Z INKER DRIVERS
011794-003 BELT TMG "40DP".0816P 98T 1/4W
244386-001 THETA DRIVE ASSY,ELECTRICAL
244418-001 GASKET, MOUNTING