EG2001-A.2001X III
Belt Track
  Indexer Assembly
  2010X (100Wafer Capacity)
  Control Module
  Noncontact Edge Sensor
  Wafer Id Reader
  Programable Chuck Pz5
  Thermal Chuck
  Test Head Manipuator
Disk Based System


2001xII 2001xIII
Indexer Assembly

  244180-003 WAFER SENSOR ASSY
244185-001 STEPPER MOTOR ASSY,Indexer
244190-001 PCB ASSY,INDEXER-STANDARD
  244470-001 GASKET,STEPPER MOTOR INDEXER
  245021-001 CAP ASSY, MOTOR-REV INDICATOR
244372-001 CABLE ASSY,WAFER SENSOR
244373-001 CABLE ASSY,WAFER SENSOR INDEXER
244373-002 CABLE ASSY,UP SENSOR
244373-003 CABLE ASSY,REV COUNTER INDEXER
244373-004 CABLE ASSY,THETA SENSOR PZ5
  244373-006 CABLE ASSY,FLAT FINDER
  244373-008 CABLE ASSY,X FER ARM
  244373-009 CABLE ASSY,Z SENSOR
244373-010 CABLE ASSY,XFER ARM
244373-011 CABLE ASSY, RTN TRK WFR SNSR
244373-012 CABLE ASSY,Z DOWN PZ 5
  244373-013 CABLE ASSY,Z SENSOR
244180-002 WAFER SENSOR ASSY, NARROW
  114714-001 HSG,WAFER SENSOR,NARROW-MACH
  114714-002 HSG WAFER SENSOR MACHINED
  114717-001 SHUTTER, UNDER 4" WAFER SENSOR
  244374-001 CABLE ASSY,STEPPER MOTOR INDEX
244174-001 SWITCH MOD- CASSETTE SENSOR
011799-005 BELT,TMG"40DP".0816P;81T;1/4W.