EG2001-A.2001X III
Belt Track
  Indexer Assembly
  2010X (100Wafer Capacity)
  Control Module
  Noncontact Edge Sensor
  Wafer Id Reader
  Programable Chuck Pz5
  Thermal Chuck
  Test Head Manipuator
Disk Based System


2001xII 2001xIII
Control Module

  247492-001 CHASSIS, PCB MTG-POWER MODULE
247228-001 PCB ASSY,X-THETA DRIVER
  247213-001 PCB ASSY,MAIN SYSTEM BOARD-STD
  247222-001 PCB ASSY,LIN MTR SUBSYS-2010X
247222-002 PCB ASSY,LIN MTR SUBSYS-3001X
  247219-001 PCB ASSY,PREALIGN SUBSYSTEM
247219-002 PCB ASSY,PREALIGN SUBSYS-3001X
  247225-001 PCB ASSY,XFR ARM SUBSYS-2010X
247225-002 PCB ASSY,XFR ARM SUBSYS-3001X
247216-001 PCB ASSY,MAIN SYSTEM I/O
247439-001 PCB ASSY,SOLENOID I/O INTFC
247228-001 PCB ASSY,X-THETA DRIVER
  247496-001 BRACKET,PCB-POWER MODULE
  247496-002 BRACKET,PCB-POWER MODULE
  247496-003 BRACKET,PCB-POWER MODULE
  247496-004 BRACKET,PCB-POWER MODULE
  247498-001 SUPPORT, PCB, POWER MODULE
  247733-001 PROM ASSY, LINEAR MOTOR-2010X