EG2001-A.2001X III
Belt Track
  Indexer Assembly
  2010X (100Wafer Capacity)
  Control Module
  Noncontact Edge Sensor
  Wafer Id Reader
  Programable Chuck Pz5
  Thermal Chuck
  Test Head Manipuator
Disk Based System


2001xII 2001xIII
2010X (100Wafer Capacity)

247265-001 PCB ASSY,HDLR COMMUNICATION
  247155-001 PCB ASSY,QUICK-LOADER INTFC
  247155-002 PCB ASSY,QUICK-LOADER INTFC
247204-001 PCB ASSY,WAFER SENSE INTERFACE
  246597-001 PCB ASSY,MANIFOLD
  246614-001 SENSOR ASSY, Z-DOWN - P2
  246614-002 SENSOR ASSY,THETA MOTOR-P1
  246614-003 SENSOR ASSY, THETA MOTOR - P12
  246614-004 SENSOR ASSY, THETA MOTOR - P13
  246614-005 SENSOR ASSY, QL-UP - P12
  246614-006 SENSOR ASSY, QL-DOWN - P13
  246614-007 SENSOR ASSY, MH THETA - P1
  246614-008 SENSOR ASSY, MH THETA - P2
  246614-009 SENSOR ASSY, MH THETA - P53
  246614-010 SENSOR ASSY, MH THETA - P54
  246615-001 SENSOR ASSY,EDGE SCALE
  247110-001 STEPPER MOT 0.9 DEG SPEC CONT
  247324-001 SENSOR ASSY,PROXIMITY 18.00IN.
  247324-002 SENSOR ASSY,PROXIMITY 30.00IN.
  247324-003 SENSOR ASSY,PROXIMITY 12.00IN.
  247324-004 SENSOR ASSY,PROXIMITY 65.00IN.
  251407-002 SENSOR ASSY,PROX-HOLD STA 2010
  251407-003 SENSOR ASSY,PROX-HOLD STA 3001
  251407-004 SENSOR ASSY,PROX-PREALIGN 3001
  045518-001 SENSOR DIFFUSE BANNER#SP100D
  045518-002 SENSOR AMPLIFIER BANNER#MPC3
  045518-003 PRESSURE SENSOR.0-5psid. 60mV.
  045518-004 PRESSURE SENSOR.0-1.8psid.10mA
  045518-005 AMPLIFIER,OPTICAL SENSOR. 5VDC
045518-008 PRESSURE SENS.0-100psid. 100mV
247028-001 SENSOR ASSY, FLAT FIND - STD
  247028-002 SENSOR ASSY, FLAT FIND - SPCL
  247028-003 SENSOR ASSY,FLAT FIND-STD 3001
244984-001 GASKET,MOTOR-THERMAL TRANSFER
  246624-001 MOTOR ASSY,STEPPER-PREALIGN
246949-001 PULLEY, 15T, Theta MOTOR P133
  247030-001 SENSOR HOUSING, FLAT FIND-STD
  247030-003 SENSOR HOUSING, FLAT FIND
247029-001 SNSR CA ASSY,FL FIND STD
247029-002 SNSR CA ASSY, FL FIND SPCL
  247029-003 SNSR CA ASSY,FL FIND STD-3001X
  247029-004 SNSR CA ASSY,FL FIND STD-4085
  247031-001 SENSOR MOUNT, FLAT FIND - STD
  247031-003 SENSOR MOUNT, FLAT FIND
  246603-001 X-MOTOR SUBASSY
247012-001 PCB ASSY,LINEAR MOTOR INTFC
  249482-001 SUPPORT,LINEAR MOTOR INTERFACE
  246645-001 INSULATOR, LINEAR MOTOR INTERF
  249038-001 TOOL,ENCODER STEP MOT-ORIENT
246949-001 PULLEY, 15T, Theta MOTOR P133