| Wafer Handling |
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Automatic Wafer Sizing for 100mm”, 150mm, 200mm(4”, 5”, 6”,8”) |
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1 Cassette of 25 or 26 slots |
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- Sequential
- Programmable acces controllable via external I/O
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Auxiliary wafer tray |
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Quick single wafer insertion and extration |
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Cross slot wafer detection |
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Intelligent Quickload pipelining |
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Closed-loop material handling. |
| Accuracy |
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+_ um(system accuracy includes X,Y, ψ and Z)**
**definition available upon request |
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| XY Positioning |
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Travel-19.80”(503mm) X,9.42 (239mm)Y |
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Maximum Speed-10.0 in/sec(254.0mm/sec)
Maximum Acceleration: |
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- Standard Configuration –1.1G X axis, 0.53GY axis
- High Force Configuration-0.88G X axis, 0.42G Y axis
|
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Resolution-0.01 mils(0.25um) |
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Repeatability-0.01 mils(0.25um) |
