Vision Module Replacement
  Networking for EG2001
  EG4080/90 Probe Mark Out of Spec
  High Voltage Kit 1.5kv and About
  Promotion
  2006 CK-100 Version III Release
  Looking for EG 4090μ
  Small space limited Here Is The Solution
  Accuaracy Fine-Tuning On Site
  New Upgrade EG2001x8


4080 Accuracy Upgrade
 

XY Accuracy Improvement.
● XY Step Resolution-From 1um to 0.25um.
● Forcer/Platen Motor Renovation.
● Overall System Accuracy-From 12 um to 8 um peak to peak
● Before Fine Tunning-The blue dots.
● After Fine Tunning-The red dots.
 
  Actual Case on EG4090µ of ASE KAOHSIUNG....
 
Before Mask 32.9°c    
X Total Peak-Peak 4.751um
Y Total Peak-Peak 10.46um
X Linear 4.57ppm
Y Linear -3.77ppm
X Theta -1.63rad
Y Theta -17.34rad
PlatenT Avg. 32.9c
Chuck Temperature 88c
   
Before Mask 36.0 °c    
 
X Total Peak-Peak 8.49um
Y Total Peak-Peak 9.35um
X Linear 12.91ppm
Y Linear -0.74ppm
X Theta -4.54rad
Y Theta -19.64rad
PlatenT Avg. 36.0c
Chuck Temperature 88c
  We cousidered about temperature. The picture below shows the result after our renovation.
After Mask 35.9°c    
X Total Peak-Peak 5.1um
Y Total Peak-Peak 6.73um
X Linear 3.45ppm
Y Linear -3.50ppm
X Theta 35.91rad
Y Theta 35.91rad
PlatenT Avg. 35.9c
Chuck Temperature 88c

 

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